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Sample holders for thin films and MEMS

From a simple contacting point to innovative 4-point bending sample holders, the right sample holder can help you characterize thin films and MEMS quickly and reliably.

From simple to innovative

Whether you want to contact structures measuring less than 50 µm in diameter, perform high-voltage and/or temperature-based measurements on thin films, or determine the inverse e31,f coefficient using the Kano/Muralt method, our range of sample holders for thin films and MEMS are the perfect match for your requirements. See for yourself.

  • The basic contacting point is our base system for characterizing thin films.

    It consists of an acrylic plate with a magnetic base for use with one of our measuring tip holders. A high-resolution microscope camera is available as an optional extra. This allows you to contact structures measuring less than 50 µm in diameter.

    The optional cover with interlock system makes it possible to also use a HV amplifier. The maximum sample size is 8 inches.

    Features
    Easy to operate
    For sample sizes up to 8 inches
    Up to 4 positioners for 4-point measuring with RS module
    Optional high-resolution microscope camera
    High voltage option with interlock system

    Easy to operate

      For sample sizes up to 8 inches

        Up to 4 positioners for 4-point measuring with RS module

          Optional high-resolution microscope camera

            High voltage option with interlock system

            • The TFSHU sample holder for electrical testing lets you perform high-voltage and/or temperature-based measurements on thin film samples.

              These are essential for developing actuator or sensor materials. The heating unit is integrated in the sample holder, removing the need for an additional temperature chamber.

              Features
              Sample surface must be polished when measuring MEMS components
              Special adapter for measuring the indirect e31 ,f coefficient on sawn samples
              Interlock protective circuit
              Sample contacting via two positioners

              Sample surface must be polished when measuring MEMS components

                Special adapter for measuring the indirect e31 ,f coefficient on sawn samples

                  Interlock protective circuit

                    Sample contacting via two positioners

                      SPECIFICATIONS
                      Temperaturemax. 250°C (temperature measurement on sample)
                      Sample thickness0,1–10 mm
                      Sample diameter max. 25 x 25 mm 2 (1” x 1”)
                      Voltagemax. 400 V

                      Temperature

                      • max. 250°C (temperature measurement on sample)

                      Sample thickness

                      • 0,1–10 mm

                      Sample diameter

                      • max. 25 x 25 mm 2 (1” x 1”)

                      Voltage

                      • max. 400 V

                      The laser unit for measuring MEMS structures can be expanded with a positioning system. Combined with an improved camera system, this allows you to precisely set up even tiny structures. An additional optional sample holder can be used to measure the inverse e31,f coefficient according to the Kano/Muralt method.

                      The temperature range can also be extended to up to 500°C and/or -100°C. This allows you to comprehensively characterize ferroelectric, high-temperature materials.

                    • The 4-point bending sample holder lets you experience the innovative prowess of aixACCT Systems. Its design makes it possible to generate homogeneous and defined mechanical stresses in the thin film.

                      The 4-point bending sample holder lets you experience the innovative prowess of aixACCT Systems. Its design makes it possible to generate homogeneous and defined mechanical stresses in the thin film.

                      This ensures precise measurement of the piezoelectric e31 ,f coefficient within defined conditions. It is also possible to electrically pole the sample with intermittent measurement of the e31 ,f coefficient. This can be useful if you wish to investigate the influence of varying poling conditions on sample performance.

                      In addition, the new integrated amplifier and switching unit lets you investigate fatigue with intermittent measurements of the e31 ,f coefficient, examine DC voltage dependencies and even perform h31 measurements. There is also a temperature option that enables temperature-based measurements.

                      Features
                      4-point bending sample holder with piezo actuator for force generation
                      Fixture for laser system
                      Easy contact to top and bottom electrode
                      Automated switching between e31 ,fmeasurement and poling
                      Measurement of electrical and mechanical fatigue
                      Requires special sample geometry
                      Special positioning tool for simple and precise sample alignment

                      4-point bending sample holder with piezo actuator for force generation

                        Fixture for laser system

                          Easy contact to top and bottom electrode

                            Automated switching between e31 ,fmeasurement and poling

                              Measurement of electrical and mechanical fatigue

                                Requires special sample geometry

                                  Special positioning tool for simple and precise sample alignment

                                    SPECIFICATIONS
                                    Temperature range:room temperature up to max. 200°C
                                    Frequency range: from 10 mHz
                                    Voltage: max. 400 V (for poling)

                                    Temperature range:

                                    • room temperature up to max. 200°C

                                    Frequency range:

                                    • from 10 mHz

                                    Voltage:

                                    • max. 400 V (for poling)

                                  For more features and details about our aix4PB sample holder, please refer to the product sheet: