advanced customized characterization technology

 
Product World MEMS Products
Double Beam Laser Interferometer (aixDBLI)

  Technical Data

Resolution 1 pm tested by x-cut Quartz
Displacement/strain measurement
  • 50 Hz - 5 kHz
  • 100 mV to 10 V
    up to 25 V (optional)
Piezoelectric d33 coefficient
Bias voltage   (1 mHz to 1 Hz)
100 mV to 10 V
up to 25 V (optional)
Small signal   (1 kHz to 10 kHz)
100 mV to 10 V
Electrostriction M33 Similar to d33
C(V) Measurement
Bias voltage   (1 mHz to 1 Hz)
100 mV to 10 V
up to 25 V (optional)
Small signal   (1 kHz to 10 kHz)
100 mV to 10 V
aixDBLI
Main Page
Specifications
Sample Measurement "Polarization and Displacement"
Sample Measurement "Capacitance and Piezocoefficient"
Product Sheet/ Documentation (PDF)
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